{"id":12790,"date":"2024-08-21T11:15:00","date_gmt":"2024-08-21T08:15:00","guid":{"rendered":"https:\/\/Muhandes.Net\/?p=12790"},"modified":"2024-08-21T11:59:25","modified_gmt":"2024-08-21T08:59:25","slug":"%d8%aa%d8%a3%d8%ab%d9%8a%d8%b1-%d9%85%d8%ae%d8%b7%d8%b7%d8%a7%d8%aa-%d8%a7%d9%84%d9%86%d8%a8%d8%b6-%d8%b9%d9%84%d9%89-%d8%aa%d8%ad%d9%85%d9%84-%d8%a7%d9%84%d9%85%d8%b9%d8%a7%d8%af%d9%86-%d8%a7%d9%84","status":"publish","type":"post","link":"https:\/\/Muhandes.Net\/?p=12790","title":{"rendered":"\u062a\u0623\u062b\u064a\u0631 \u0645\u062e\u0637\u0637\u0627\u062a \u0627\u0644\u0646\u0628\u0636 \u0639\u0644\u0649 \u062a\u062d\u0645\u0644 \u0627\u0644\u0645\u0639\u0627\u062f\u0646 \u0627\u0644\u0641\u064a\u0631\u0648\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629"},"content":{"rendered":"\n
\"\"<\/figure>\n\n\n\n

\u064a\u062a\u0645 \u0627\u0644\u062a\u062d\u0642\u064a\u0642 \u0628\u0634\u0643\u0644 \u0634\u0627\u0645\u0644 \u0641\u064a \u0622\u062b\u0627\u0631 \u0645\u062e\u0637\u0637\u0627\u062a \u0627\u0644\u0646\u0628\u0636 \u0627\u0644\u0645\u062e\u062a\u0644\u0641\u0629 \u0639\u0644\u0649 \u0627\u0644\u062a\u062d\u0645\u0644\u060c \u0628\u062d\u064a\u062b \u062a\u0639\u062a\u0628\u0631 \u0627\u0644\u0623\u0634\u0643\u0627\u0644 \u0627\u0644\u0645\u0648\u062c\u064a\u0629 \u0634\u0628\u0647 \u0627\u0644\u0645\u0646\u062d\u0631\u0641\u0629 \u0648\u0627\u0644\u0645\u062b\u0644\u062b\u0629 \u0641\u064a \u0627\u062e\u062a\u0628\u0627\u0631\u0627\u062a \u0627\u0644\u062a\u062d\u0645\u064a\u0644.<\/p>\n\n\n\n

\u062a\u062d\u0644\u064a\u0644 \u0645\u062e\u0637\u0637\u0627\u062a \u0627\u0644\u0646\u0628\u0636 \u0639\u0644\u0649 \u062a\u062d\u0645\u0644 \u0627\u0644\u0645\u0639\u0627\u062f\u0646 \u0627\u0644\u0641\u064a\u0631\u0648\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629<\/strong><\/p>\n\n\n\n

\u062a\u0639\u062f \u0627\u0644\u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u0641\u064a\u0631\u0648\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629 \u0627\u0644\u0642\u0627\u0626\u0645\u0629 \u0639\u0644\u0649 (HfO2) \u0648\u0627\u0644\u0645\u062a\u0648\u0627\u0641\u0642\u0629 \u0645\u0639 \u062a\u0642\u0646\u064a\u0629 \u0623\u0643\u0633\u064a\u062f \u0627\u0644\u0645\u0639\u0627\u062f\u0646 \u0648\u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u062a\u0643\u0645\u064a\u0644\u064a\u0629 (CMOS) \u0648\u0627\u0639\u062f\u0629 \u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0630\u0627\u0643\u0631\u0629 \u0648\u0627\u0644\u0645\u0646\u0637\u0642 \u0648\u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0639\u0635\u0628\u064a\u0629\u060c \u0648\u0639\u0644\u0649 \u0648\u062c\u0647 \u0627\u0644\u062a\u062d\u062f\u064a\u062f \u0648\u0641\u064a\u0645\u0627 \u064a\u062a\u0639\u0644\u0642 \u0628\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0630\u0627\u0643\u0631\u0629\u061b \u062a\u062a\u0645\u062a\u0639 \u0647\u0630\u0647 \u0627\u0644\u0623\u062c\u0647\u0632\u0629 \u0628\u062c\u0647\u062f \u062a\u0634\u063a\u064a\u0644 \u0623\u0642\u0644 \u0648\u0633\u0631\u0639\u0629 \u0623\u0639\u0644\u0649 \u0645\u0642\u0627\u0631\u0646\u0629 \u0628\u0627\u0644\u062a\u0642\u0646\u064a\u0627\u062a \u0627\u0644\u0623\u062e\u0631\u0649\u060c \u0648\u0628\u0627\u0644\u0625\u0636\u0627\u0641\u0629 \u0625\u0644\u0649 \u0627\u0644\u0623\u062f\u0627\u0621 \u0627\u0644\u0645\u062a\u0641\u0648\u0642.<\/p>\n\n\n\n

\u0643\u0645\u0627 \u062a\u0639\u062a\u0628\u0631 \u0627\u0644\u0642\u062f\u0631\u0629 \u0639\u0644\u0649 \u0627\u0644\u062a\u062d\u0645\u0644 \u0623\u0647\u0645 \u0642\u0636\u064a\u0629 \u0645\u0648\u062b\u0648\u0642\u064a\u0629\u060c \u0648\u0627\u0644\u062a\u064a \u064a\u0645\u0643\u0646 \u0623\u0646 \u062a\u0643\u0648\u0646 \u0645\u0631\u062a\u0628\u0637\u0629 \u0628\u0625\u0639\u0627\u062f\u0629 \u062a\u0648\u0632\u064a\u0639 \u0623\u0648 \u062a\u0648\u0644\u064a\u062f \u0627\u0644\u0639\u064a\u0648\u0628 (\u0639\u0644\u0649 \u0627\u0644\u0623\u0631\u062c\u062d \u0634\u063a\u0648\u0631 \u0627\u0644\u0623\u0643\u0633\u062c\u064a\u0646)\u060c \u0648\u0639\u0644\u0649 \u0627\u0644\u0631\u063a\u0645 \u0645\u0646 \u062a\u0637\u0648\u064a\u0631 \u0627\u0644\u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u0643\u0647\u0631\u0648\u0645\u0627\u0626\u064a\u0629 \u0627\u0644\u0642\u0627\u0626\u0645\u0629 \u0639\u0644\u0649 (HfO2)\u060c \u0648\u0627\u0644\u062a\u064a \u062a\u062a\u0645\u062a\u0639 \u0628\u0642\u062f\u0631\u0629 \u0639\u0627\u0644\u064a\u0629 \u0639\u0644\u0649 \u0627\u0644\u062a\u062d\u0645\u0644\u061b \u0625\u0644\u0627 \u0623\u0646 \u0645\u062e\u0637\u0637\u0627\u062a \u0627\u0644\u0646\u0628\u0636 \u0644\u0644\u062a\u0642\u064a\u064a\u0645 \u063a\u064a\u0631 \u0645\u062a\u0633\u0642\u0629\u060c \u0648\u0641\u064a \u0647\u0630\u0627 \u0627\u0644\u0639\u0645\u0644 \u062a\u064f\u0633\u062a\u062e\u062f\u0645 \u0627\u062e\u062a\u0628\u0627\u0631\u0627\u062a \u062f\u0648\u0631\u0629 \u0627\u0644\u062a\u062d\u0645\u0644 \u0645\u0639 \u0645\u062e\u0637\u0637\u0627\u062a \u0627\u0644\u0646\u0628\u0636\u0627\u062a \u0627\u0644\u0645\u062e\u062a\u0644\u0641\u0629.<\/p>\n\n\n\n

\u0647\u064a\u0643\u0644 \u0627\u0644\u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u0641\u064a\u0631\u0648\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629 \u0648\u0627\u0644\u062a\u0641\u0627\u0635\u064a\u0644 \u0627\u0644\u062a\u062c\u0631\u064a\u0628\u064a\u0629<\/strong><\/p>\n\n\n\n

\u064a\u062a\u0645 \u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u0645\u0643\u062b\u0641\u0627\u062a (HfO2) \u0627\u0644\u062d\u062f\u064a\u062f\u064a\u0629 \u0648\u0627\u0644\u0645\u0639\u062f\u0646\u064a\u0629 \u0648\u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629 \u0648\u0627\u0644\u0639\u0627\u0632\u0644 \u0648\u0627\u0644\u0645\u0643\u062b\u0641\u0627\u062a \u0634\u0628\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0629 (MFIS) \u0643\u0623\u0645\u062b\u0644\u0629 \u0644\u0644\u0627\u062e\u062a\u0628\u0627\u0631\u060c \u0628\u062d\u064a\u062b \u064a\u0648\u0636\u062d \u0627\u0644\u0634\u0643\u0644 \u0627\u0644\u062a\u0627\u0644\u064a (1) \u0645\u0643\u062b\u0641 (Si-doped HfO2) \u0627\u0644\u0641\u064a\u0631\u0648\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629 \u0648\u0635\u0648\u0631\u0629 \u0627\u0644\u0645\u062c\u0647\u0631 \u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a \u0644\u0644\u0625\u0631\u0633\u0627\u0644 (TEM) \u0644\u0644\u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u0645\u0635\u0646\u0651\u0639\u0629 \u0639\u0644\u0649 \u0631\u0642\u0627\u0626\u0642 (Si 300) \u0645\u0645 \u0645\u0646 \u0627\u0644\u0646\u0648\u0639 (p)\u060c \u0643\u0645\u0627 \u0627\u0633\u062a\u062e\u062f\u0645\u062a \u0627\u0644\u0645\u0643\u062b\u0641\u0627\u062a \u0643\u0648\u0645\u0629 \u062d\u062f\u064a\u062f \u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629 \u0642\u0627\u0626\u0645\u0629 \u0639\u0644\u0649 (9.5) \u0646\u0627\u0646\u0648\u0645\u062a\u0631 \/ (TiN \/ HfO2) \u0645\u0639 \u0645\u0646\u0634\u0637\u0627\u062a [Si (3.6 \u066a)] \u0639\u0644\u0649 \u0631\u0643\u064a\u0632\u0629 (Si).<\/p>\n\n\n\n

\u0648\u0628\u0639\u062f \u062a\u0646\u0638\u064a\u0641 \u0627\u0644\u0633\u0637\u062d\u061b \u062a\u062a\u0634\u0643\u0644 \u0627\u0644\u0637\u0628\u0642\u0629 \u0627\u0644\u0633\u0637\u062d\u064a\u0629 [1nm SiO2 (IL)] \u0639\u0646 \u0637\u0631\u064a\u0642 \u063a\u0645\u0631 \u0627\u0644\u0639\u064a\u0646\u0627\u062a \u0641\u064a \u0645\u062d\u0644\u0648\u0644 (H2O2)\u060c \u0628\u062d\u064a\u062b \u062a\u0631\u0633\u0628\u062a \u0627\u0644\u0637\u0628\u0642\u0629 \u0627\u0644\u062d\u062f\u064a\u062f\u064a\u0629 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629 \u0639\u0646 \u0637\u0631\u064a\u0642 \u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0637\u0628\u0642\u0629 \u0627\u0644\u0630\u0631\u064a\u0629 (ALD) \u0645\u0639 \u0645\u0646\u0634\u0637\u0627\u062a (Si) \u0628\u0639\u062f \u0630\u0644\u0643\u060c \u0643\u0645\u0627 \u062a\u0645 \u062a\u0631\u0633\u064a\u0628 (5-nm TiN) \u0648(50-nm poly-Si) \u0628\u0648\u0627\u0633\u0637\u0629 (ALD) \u0648\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0628\u062e\u0627\u0631 \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a \u0639\u0644\u0649 \u0627\u0644\u062a\u0648\u0627\u0644\u064a.<\/p>\n\n\n\n

\u0648\u0644\u0628\u0644\u0648\u0631\u0629 \u0627\u0644\u0637\u0628\u0642\u0629 \u0627\u0644\u062d\u062f\u064a\u062f\u064a\u0629 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629\u061b \u062a\u0645 \u0625\u062c\u0631\u0627\u0621 \u0627\u0644\u062a\u0644\u062f\u064a\u0646 \u0628\u0639\u062f \u0627\u0644\u0645\u0639\u062f\u0646\u0629 \u0641\u064a \u0627\u0644\u0645\u062d\u064a\u0637 (N2) \u0644\u0645\u062f\u0629 (30) \u062b\u0627\u0646\u064a\u0629 \u0639\u0646\u062f (1000) \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629\u060c \u0628\u062d\u064a\u062b \u062a\u0645 \u0625\u062c\u0631\u0627\u0621 \u0642\u064a\u0627\u0633\u0627\u062a \u0627\u0644\u062c\u0647\u0627\u0632 \u0628\u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u0648\u062d\u062f\u0629 \u0627\u0644\u0642\u064a\u0627\u0633 \u0627\u0644\u0633\u0631\u064a\u0639 (WGFMU)\u060c \u0648\u0627\u0644\u062a\u064a \u063a\u0627\u0644\u0628\u0627\u064b \u0645\u0627 \u062a\u0645 \u0627\u0633\u062a\u062e\u062f\u0627\u0645\u0647\u0627 \u0641\u064a \u0627\u0644\u062f\u0631\u0627\u0633\u0627\u062a \u0627\u0644\u0633\u0627\u0628\u0642\u0629\u060c \u0628\u062d\u064a\u062b \u062a\u0645 \u0642\u064a\u0627\u0633 \u062b\u0644\u0627\u062b\u0629 \u0623\u062c\u0647\u0632\u0629 \u0644\u0643\u0644 \u062d\u0627\u0644\u0629\u060c \u0643\u0645\u0627 \u0648\u064a\u0645\u0643\u0646 \u0627\u0644\u062d\u0635\u0648\u0644 \u0639\u0644\u0649 \u0646\u062a\u0627\u0626\u062c \u0645\u062a\u0633\u0642\u0629.<\/p>\n\n\n\n

\"\"<\/figure>\n","protected":false},"excerpt":{"rendered":"

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